Title :
Relationship between profile of stress generated interface traps and degradation of submicron LDD MOSFET´S
Author :
Okhonin, S. ; Hessler, T. ; Dutoit, M.
Author_Institution :
Swiss Federal Institute of Technology
Keywords :
CMOS technology; Degradation; Electric resistance; Interface states; Life estimation; Lifetime estimation; MOSFET circuits; Parameter estimation; Pulse measurements; Stress measurement;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888188