• DocumentCode
    2684640
  • Title

    Relationship between profile of stress generated interface traps and degradation of submicron LDD MOSFET´S

  • Author

    Okhonin, S. ; Hessler, T. ; Dutoit, M.

  • Author_Institution
    Swiss Federal Institute of Technology
  • fYear
    1996
  • fDate
    1996
  • Firstpage
    1671
  • Lastpage
    1674
  • Keywords
    CMOS technology; Degradation; Electric resistance; Interface states; Life estimation; Lifetime estimation; MOSFET circuits; Parameter estimation; Pulse measurements; Stress measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
  • Print_ISBN
    0-7803-3369-1
  • Type

    conf

  • DOI
    10.1109/ESREF.1996.888188
  • Filename
    888188