• DocumentCode
    2684692
  • Title

    Development of an RF plasma source using helicon waves for the study of plasma-material interactions in fusion machines

  • Author

    Ra, Y. ; Schmitz, L. ; Chia, Pierre ; Conn, R.W.

  • fYear
    1990
  • fDate
    21-23 May 1990
  • Firstpage
    160
  • Abstract
    Summary form only given. A plasma source using a Nagoya type III antenna surrounding a 30-cm-long glass tube attached to a 1.5-m-long cylindrical chamber to excite helicon waves has been developed. The plasma is confined by an axial magnetic field in the range of 0.2-1 kG generated by a pair of Helmholtz coils located at both ends of the chamber. A plasma density of about 1012 cm-3 is obtained with an electron temperature of about 10 eV. The chemical sputtering of graphite by an oxygen plasma was studied using this plasma source
  • Keywords
    fusion reactor theory and design; plasma confinement; plasma production; plasma waves; plasma-wall interactions; 0.2 to 1 kG; 1.5 m; 10 eV; 30 cm; Helmholtz coils; Nagoya type III antenna; RF plasma source; axial magnetic field; chamber; chemical sputtering; cylindrical chamber; electron temperature; fusion machines; glass tube; graphite; helicon waves; plasma confinement; plasma density; plasma-material interactions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1990. IEEE Conference Record - Abstracts., 1990 IEEE International Conference on
  • Conference_Location
    Oakland, CA, USA
  • Type

    conf

  • DOI
    10.1109/PLASMA.1990.110710
  • Filename
    5725982