Title :
Study of the soft leakage current induced ESD on LDD transistor
Author_Institution :
Matsushita Electronics Corporation
Keywords :
Circuit testing; Electronic equipment testing; Electrostatic discharge; Leakage current; MOSFETs; Protection; Semiconductor device testing; Temperature; Transistors; Variable structure systems;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888197