Title :
Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser
Author :
Masuda, Masashi ; Sugioka, Koji ; Cheng, Ya ; Kawachi, Masako ; Shihotama, K. ; Toyoda, Koichi ; Midorikawa, Katsumi
Author_Institution :
RIKEN, Inst. of Phys. & Chem. Res., Saitama, Japan
Abstract :
Fabrication of hollow three-dimensional (3-D) microstructures embedded in a photosensitive glass by a femtosecond laser is demonstrated. This technique is applied for manufacturing microfluidic structures composed of microcells, microchannels, and microvalves.
Keywords :
high-speed optical techniques; laser materials processing; microfluidics; microvalves; optical glass; femtosecond laser; hollow three-dimensional microstructures; microcells; microchannels; microfluidic structures; microvalves; photosensitive glass; Chemical industry; Chemical lasers; Chemical technology; Glass; Laser theory; Microchannel; Microfluidics; Microvalves; Optical device fabrication; Ultrafast electronics;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277233
