Title :
Formation of periodic structures by laser ablation using interfered femtosecond laser beams
Author :
Nakata, Yoshiki ; Okada, Tatsuo ; Maeda, Mitsuo
Author_Institution :
Grad. Sch. of ISEE, Kyushu Univ., Fukuoka, Japan
Abstract :
Periodic structures were processed on materials by laser ablation using interfered femtosecond laser beams. Surface morphology and diffractive properties of the processed structures were investigated.
Keywords :
high-speed optical techniques; laser ablation; light diffraction; light interference; periodic structures; surface morphology; diffractive properties; interfered femtosecond laser beams; laser ablation; periodic structures; surface morphology; Diffraction; Gas lasers; Gratings; Laser ablation; Laser beams; Laser theory; Lenses; Periodic structures; Shape; Surface morphology;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277234
