Title :
Characterization of TiO2/SiO2 hybrid sol-gel glass and its use for fabrication of micro-optical elements
Author :
Yu, Weixing ; Yuan, X.-C. ; Ngo, N.Q. ; Cheong, W.C. ; Koudriachov, V.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
Abstract :
We demonstrated fabrication of micro-optical elements in a TiO2/SiO2 hybrid sol-gel glass with different facilities including HEBS gray scale mask, laser direct writer and e-beam lithography. With different facility, we first calibrated this material and then designed and fabricated micro-optical elements according to calibration result. Micro-optical elements including blazed gratings and microlenses were fabricated successfully.
Keywords :
diffraction gratings; electron beam lithography; masks; microlenses; optical fabrication; optical glass; organic-inorganic hybrid materials; silicon compounds; sol-gel processing; titanium compounds; HEBS gray scale mask; TiO2-SiO2; TiO2/SiO2 hybrid sol-gel glass; blazed gratings; e-beam lithography; laser direct writer; micro-optical elements fabrication; microlenses; Calibration; Glass; Gratings; Lenses; Microoptics; Optical device fabrication; Optical films; Optical refraction; Optical sensors; Optical variables control;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277250
