DocumentCode :
2685015
Title :
Nanoscopic evaluation of semiconductor properties by scanning probe microscopies
Author :
Balk, L.J. ; Heiderhoff, R. ; Koschinki, P. ; Maywald, M.
Author_Institution :
Bergische Universitat - Gesamthochschule Wuppertal
fYear :
1996
fDate :
1996
Firstpage :
1767
Lastpage :
1774
Keywords :
Current measurement; Electron beams; Mechanical factors; Scanning electron microscopy; Scanning probe microscopy; Semiconductor materials; Space charge; Spatial resolution; Thermal conductivity; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
Type :
conf
DOI :
10.1109/ESREF.1996.888212
Filename :
888212
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2685015
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