DocumentCode
2685025
Title
Undercut etching the active region of the waveguide for traveling-wave electroabsorption modulator
Author
Cheng, W.C. ; Chiu, Yi-Jen
Author_Institution
Dept. of Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
We proposed a novel waveguide structure for electroabsorption modulator. By selective undercut etching the active region, the doped conducting layers can be separated. The calculation shows that it has the properties of lower microwave loss, higher microwave speed and higher optical coupling efficiency compared with conventional ridge type.
Keywords
electro-optical modulation; electroabsorption; etching; optical waveguides; waveguide couplers; microwave loss; optical coupling efficiency; traveling-wave electroabsorption modulator; undercut etching; waveguide; Etching; Frequency; Optical coupling; Optical losses; Optical materials; Optical modulation; Optical waveguides; PIN photodiodes; Semiconductor materials; Semiconductor waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277253
Filename
1277253
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