Title :
Undercut etching the active region of the waveguide for traveling-wave electroabsorption modulator
Author :
Cheng, W.C. ; Chiu, Yi-Jen
Author_Institution :
Dept. of Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
We proposed a novel waveguide structure for electroabsorption modulator. By selective undercut etching the active region, the doped conducting layers can be separated. The calculation shows that it has the properties of lower microwave loss, higher microwave speed and higher optical coupling efficiency compared with conventional ridge type.
Keywords :
electro-optical modulation; electroabsorption; etching; optical waveguides; waveguide couplers; microwave loss; optical coupling efficiency; traveling-wave electroabsorption modulator; undercut etching; waveguide; Etching; Frequency; Optical coupling; Optical losses; Optical materials; Optical modulation; Optical waveguides; PIN photodiodes; Semiconductor materials; Semiconductor waveguides;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277253
