Title :
Wafer level reliability: process control for reliability
Author :
Turner, Timothy E.
Author_Institution :
Keithley Instruments
Keywords :
Circuit testing; Etching; Feedback; Materials reliability; Process control; Semiconductor device reliability; Semiconductor device testing; Semiconductor materials; Stress measurement; Throughput;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888228
