DocumentCode
2685238
Title
Wafer level reliability: process control for reliability
Author
Turner, Timothy E.
Author_Institution
Keithley Instruments
fYear
1996
fDate
1996
Firstpage
1839
Lastpage
1846
Keywords
Circuit testing; Etching; Feedback; Materials reliability; Process control; Semiconductor device reliability; Semiconductor device testing; Semiconductor materials; Stress measurement; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN
0-7803-3369-1
Type
conf
DOI
10.1109/ESREF.1996.888228
Filename
888228
Link To Document