Title :
Precise measurement of SAW velocity using multisectional comb filter
Author :
Kolosovsky, E.A. ; Tsarev, A.V.
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
The novel precise method for the SAW velocity measurement is set up. It is based on application of multisectional comb filter, that consists of equidistantly located combs of low electrodes interdigital transducers. This multisectional filter has a frequency response consisting of a set of separate narrow peaks (traps). The phase and the group velocities of the SAW and SAW dispersion are determined by measuring by acoustooptic probe of frequency responses of filters with different metal cover. The sharp variations of peak´s intensity help to determine trap frequencies and thus the SAW velocity with high accuracy (better than 10-4). This method could be used for experimental determination constants of new piezoelectric materials
Keywords :
frequency response; interdigital transducers; surface acoustic wave filters; surface acoustic waves; ultrasonic dispersion; ultrasonic velocity measurement; IDT; SAW dispersion; SAW velocity measurement; acoustooptic probe; frequency response; group velocities; interdigital transducers; multisectional comb filter; phase velocities; precise measurement; trap frequencies; Acoustic transducers; Dispersion; Electrodes; Filters; Frequency measurement; Frequency response; Phase measurement; Probes; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-3728-X
DOI :
10.1109/FREQ.1997.639200
