Title :
The isocurrent test: a promising tool for wafer-level evaluation of the interconnect reliability
Author :
Witvrow, A. ; Van Dooren, S. ; Wouters, D. ; Van Dievel, M. ; Maex, K.
Author_Institution :
IMEC
Keywords :
Current density; Current measurement; Electrical resistance measurement; Electromigration; Equations; Life estimation; Life testing; Resistors; Stress; Temperature;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Conference_Location :
Enschede, The Netherlands
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888229
