DocumentCode :
2685273
Title :
Wafer level measurement system for SARF characterization of metal lines
Author :
Ciof, C. ; De Marinis, M. ; Neri, B.
Author_Institution :
University of Pisa
fYear :
1996
fDate :
1996
Firstpage :
1851
Lastpage :
1854
Keywords :
1f noise; Background noise; Electrical resistance measurement; Fluctuations; Level measurement; Noise generators; Noise measurement; Packaging; Probes; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
Type :
conf
DOI :
10.1109/ESREF.1996.888230
Filename :
888230
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2685273
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