Title :
Millimeter Wave Silicon Device and Integrated Circuit Technology
Author :
Stabile, P.J. ; Rosen, A. ; Janton, W.M. ; Gombar, A. ; Kolan, M.
fDate :
May 30 1984-June 1 1984
Abstract :
Silicon millimeter wave integrated circuit (SIMMWIC) technology has been developed utilizing novel fabrication techniques. These techniques have been applied to IMPATT and PIN diode fabrication schemes, the results of which are presented.
Keywords :
Annealing; Diodes; Integrated circuit technology; Ion implantation; Metallization; Millimeter wave devices; Millimeter wave integrated circuits; Millimeter wave technology; Optical pulses; Silicon devices;
Conference_Titel :
Microwave Symposium Digest, 1984 IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/MWSYM.1984.1131880
