Title :
A wafer level reliability method for short-loop processing
Author :
Duluc, J.B. ; Zimmer, T. ; Milet, N. ; Dom, J.P.
Author_Institution :
IXL, URA 846-CNRS - University BORDEAUX I
Keywords :
Breakdown voltage; Contact resistance; Digital circuits; Doping; Fluctuations; Manufacturing processes; Principal component analysis; Process control; Substrates; Testing;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888232
