DocumentCode
2685305
Title
A wafer level reliability method for short-loop processing
Author
Duluc, J.B. ; Zimmer, T. ; Milet, N. ; Dom, J.P.
Author_Institution
IXL, URA 846-CNRS - University BORDEAUX I
fYear
1996
fDate
1996
Firstpage
1859
Lastpage
1862
Keywords
Breakdown voltage; Contact resistance; Digital circuits; Doping; Fluctuations; Manufacturing processes; Principal component analysis; Process control; Substrates; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN
0-7803-3369-1
Type
conf
DOI
10.1109/ESREF.1996.888232
Filename
888232
Link To Document