Title :
Microstructure fabrication using heat shrinkable polymer films
Author :
Lee, Andrew J. ; Withford, Michael J. ; Baer, David R. ; Dawes, Judith M.
Author_Institution :
Dept. of Phys., Macquarie Univ., Sydney, NSW, Australia
Abstract :
A novel method for the fabrication of 2D microstructures in a polymer film is presented. Laser ablation of polyvinylchloride and polyolefin films using a frequency-doubled copper-vapour laser is combined with heat treatment as a direct write method in the formation of micron scale hole arrays.
Keywords :
arrays; heat treatment; laser ablation; optical harmonic generation; polymer films; copper-vapour laser; direct write method; frequency-doubling; heat treatment; laser ablation; micron scale hole arrays; microstructure fabrication; polymer films; polyolefin; polyvinylchloride; Australia; Cogeneration; Frequency; Laser ablation; Laser applications; Laser theory; Microstructure; Optical device fabrication; Physics; Polymer films;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277282