Modeling of magnetically enhanced plane parallel capacitive RF discharges

Summary form only given. A self-consistent sheath model is extended to include the effect of B₀ in the low-pressure regime λ_D≪r_eωd ωλ_e, where λ_D is the Debye length, r_e is the electron gyroradius, d is the sheath thickness, and λ_e is the electron mean free path. The main result for B₀≠0 is that the stochastic heating power deposited in the electrons by the oscillating sheath is enhanced by the factor 1+ν_eω _ce/π(ν_e2+ω²), where ν _e is the electron collision frequency, ω_ce is the electron gyration frequency, and ω is the applied radian frequency. This result was used in a simple analytic model of the self-consistent discharge equilibrium based on particle and energy balance, continuity of RF current flow, and the known sheath dynamics. Scaling laws for the plasma parameters (density, bias voltage on the powered electrode, and sheath thickness) were obtained as functions of the control parameters