Title :
A BE-SOI MEMS for inertial measurement in geophysical applications
Author :
Andò, B. ; Baglio, S. ; Marletta, V. ; Savalli, N. ; Trigona, C. ; Carbone, D. ; Patanè, D. ; Rapisarda, S. ; Zuccarello, L.
Author_Institution :
D.I.E.E.S., Univ. of Catania, Catania, Italy
Abstract :
In this paper an inertial transducer developed in BESOI MEMS technology is presented. The device is suitable for low frequency observation and could represent an interesting solution to implement low cost monitoring system for applications requiring a high amount of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. Moreover, an experimental sensor prototype is proposed and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.
Keywords :
geophysical equipment; inertial systems; microsensors; transducers; BE-SOI MEMS; geophysical applications; inertial measurement; inertial transducer; low frequency observation; Costs; Frequency; Geophysical measurements; Microelectromechanical devices; Micromechanical devices; Monitoring; Sensor phenomena and characterization; Transducers; Volcanoes; Wireless sensor networks; BE-SOI; MEMS; inertial sensor; low-cost; volcanic monitoring;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2010 IEEE
Conference_Location :
Austin, TX
Print_ISBN :
978-1-4244-2832-8
Electronic_ISBN :
1091-5281
DOI :
10.1109/IMTC.2010.5488022
