FEM simulation of BAW/SAW and SAW/BAW conversions in gratings on the surface of half-infinite substrates

FEM simulations of the SAW-BAW conversion in gratings of finite length are carried out for Si substrate. The grating is created from rectangular grooves or strips (Al, Cu). When simulating the SAW generation, we determine the SAW amplitude and investigate its dependence on the frequency and the polarization of the incident BAW, the length of the grating, the geometrical sizes of grooves/strips. As applied to BAW irradiation, the dependence is found of the central spectral peak height and shape on the frequency of the incident SAW as well as on the thickness, the width, and the number of grooves/strips.