A table-based time-domain simulation method for oversampled microelectromechanical systems

Author

Wu, Jiangfeng ; Carley, L. Richard

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2000

fDate

2000

Firstpage

37

Lastpage

41

Abstract

This paper describes a table-based behavioral modeling method and an efficient transient simulation method for oversampled MEMS systems. A system is represented by a set of coupled ordinary differential equations (ODEs) numerically described by table-based macromodels. Cubic spline interpolation is used to evaluate the model functions. The instant settling approximation and the explicit ODE solver are employed to enable efficient transient simulation. These methods are used to simulate a delta-sigma MEMS accelerometer and demonstrate high simulation efficiency

Keywords

accelerometers; delta-sigma modulation; differential equations; electronic engineering computing; interpolation; mechanical engineering computing; micromechanical devices; microsensors; splines (mathematics); time-domain analysis; transient analysis; coupled ordinary differential equations; cubic spline interpolation; delta-sigma MEMS accelerometer; explicit ODE solver; high simulation efficiency; instant settling approximation; microelectromechanical systems; model functions evaluation; oversampled MEMS systems; table-based behavioral modeling method; table-based macromodels; table-based time-domain simulation method; transient simulation method; Analytical models; Circuit simulation; Clocks; Computational modeling; Differential equations; Mathematical model; Microelectromechanical systems; Micromechanical devices; Sensor systems; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Behavioral Modeling and Simulation, 2000. Proceedings. 2000 IEEE/ACM International Workshop on

Conference_Location

Orlando, FL

Print_ISBN

0-7695-0893-6

Type

conf

DOI

10.1109/BMAS.2000.888362

Filename

888362