DocumentCode
2686579
Title
Relationship between the induction frequency and LTE in inductively coupled plasmas
Author
Mostaghimi ; Boulos
fYear
1990
fDate
21-23 May 1990
Firstpage
201
Abstract
Summary form only given. The effect of the induction frequency on the local thermodynamic equilibrium (LTE) conditions in an inductively coupled plasma (ICP) was investigated. Results were obtained for an atmospheric argon plasma under different operating conditions. Computations were carried out for an 18-mm-diameter ICP torch operating at 1 kW and argon flow rates of up to 16.2 slpm. The induction frequency varied from 3 to 40 MHz. Results were obtained by two different models. The first was based on LTE while the second one was the two-temperature model. Both models predict that the temperature levels in the torch decrease as a result of increase in frequency. The two-temperature model predicts higher electron temperatures than the heavy atom/ion temperature; this difference increases with frequency. Another important result is that the LTE predictions are consistently higher than those of the two-temperature model. This is an important difference, considering that it is the atom/ion temperature that is responsible for the heating and evaporating of aerosols or powders. Thus, for the conditions considered, the LTE predictions will overestimate the particle heating substantially
Keywords
plasma devices; plasma temperature; plasma theory; 1 kW; 18 mm; 3 to 40 MHz; ICP torch; aerosols; atmosphereic Ar plasma; electron temperatures; evaporating; heating; heavy atom temperature; induction frequency; inductively coupled plasmas; ion temperature; local thermodynamic equilibrium; particle heating; powders; two-temperature model;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1990. IEEE Conference Record - Abstracts., 1990 IEEE International Conference on
Conference_Location
Oakland, CA, USA
Type
conf
DOI
10.1109/PLASMA.1990.110822
Filename
5726092
Link To Document