Ion power losses at the electrode sheaths in a symmetric RF discharge

Author

Godyak, V.A. ; Piejak, R.B.

fYear

1990

fDate

21-23 May 1990

Firstpage

212

Lastpage

213

Abstract

Summary form only given. The power dissipated in ion acceleration in the RF sheaths of a capacitively coupled, parallel-plate, symmetric discharge driven at 13.56 MHz has been determined in argon at gas pressures of 0.01, 0.1, and 1.0 torr. Measurements were made over a range of discharge current between 0.01 A and 3.0 A. Total discharge power measurements were also made at the same time. Two methods were used to determine the ion acceleration power in the sheaths. One method is based on measuring the ion energy flux on the RF electrodes and the other is based on measuring the external electrical parameters of the discharge. The ratio of the power dissipated in ion acceleration in the RF sheaths to the total power dissipated in the discharge has been determined using both techniques

Keywords

electrodes; high-frequency discharges; plasma diagnostics; plasma sheaths; 0.01 to 3.0 A; 0.01 torr; 0.1 torr; 1.0 torr; 13.56 MHz; Ar; RF electrodes; capacitatively coupled parallel plate discharge; discharge power; electrode sheaths; external electrical parameters; ion acceleration; ion acceleration power; ion energy flux; ion power losses; power dissipation; sheaths; symmetric RF discharge;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1990. IEEE Conference Record - Abstracts., 1990 IEEE International Conference on

Conference_Location

Oakland, CA, USA

Type

conf

DOI

10.1109/PLASMA.1990.110852

Filename

5726122