Title :
Microstructure and properties of barium strontium titanate thin films prepared on copper foils via addition of PEG to the sol precursor
Author :
Fan, Yanhua ; Yu, Shuhui ; Sun, Rong ; Li, Lei ; Huang, Mian ; Yin, Yansheng ; Wan, Lixi
Author_Institution :
Shenzhen Inst. of Adv. Technol., Chinese Acad. of Sci./ Chinese Univ. of Hong Kong, Shenzhen
Abstract :
Ba0.7Sr0.3TiO3 thin films have been deposited on copper foils via sol-gel method. The films have been processed in almost inert atmosphere so that the substrate oxidation is avoided while allowing the perovskite phase to crystallize. Polyethylene glycol (PEG) with the molecular weight of 200 was employed to modify the BST precursor solutions. The effect of PEG on the microstructure and dielectric properties of BST thin films has been investigated. Leakage current for BST thin film made from the sol with PEG modification is reported.
Keywords :
barium compounds; dielectric thin films; leakage currents; sol-gel processing; strontium compounds; titanium compounds; BaSrTiO3; copper foils; dielectric properties; leakage current; polyethylene glycol; sol precursor; thin films; Barium; Binary search trees; Copper; Dielectric substrates; Dielectric thin films; Microstructure; Sputtering; Strontium; Titanium compounds; Transistors; BST thin film; Leakage current; dielectric constant; dielectric loss;
Conference_Titel :
Electronic Packaging Technology & High Density Packaging, 2008. ICEPT-HDP 2008. International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-2739-0
Electronic_ISBN :
978-1-4244-2740-6
DOI :
10.1109/ICEPT.2008.4607059
