• DocumentCode
    2688823
  • Title

    Design of 1m2 order single-layer slotted waveguide array for plasma excitation including the effect of vacuum window using the GSM-MoM analysis

  • Author

    Hirano, Takuichi ; Hirokawa, Jiro ; Ando, Makoto ; Ide, Tetsuya ; Sasaki, Atsushi ; Azuma, Kazufumi ; Nakata, Yukihiko

  • Author_Institution
    Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Japan
  • fYear
    2005
  • fDate
    3-8 July 2005
  • Firstpage
    712
  • Abstract
    A unit-cell of the array with vacuum window, except plasma and chamber, is analyzed by the GSM-MoM analysis and the array is designed for uniform aperture illumination. Uniform aperture illumination on the quartz glass strips is observed by the near field measurement using 1/5 scale model antenna, and validity of the analysis/design is confirmed. Aperture EM field distribution is measured by using 1/5 scale model antenna at 12.25GHz, and good uniformity is observed.
  • Keywords
    S-matrix theory; antenna radiation patterns; electromagnetic fields; method of moments; slot antenna arrays; 12.25 GHz; EM field distribution; GSM-MoM analysis; generalized scattering matrix-method of moments analysis; near field measurement; plasma excitation; quartz glass strips; single-layer slotted waveguide array; uniform aperture illumination; vacuum window; Apertures; Electromagnetic scattering; Electromagnetic waveguides; Glass; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Plasma waves; Windows;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas and Propagation Society International Symposium, 2005 IEEE
  • Print_ISBN
    0-7803-8883-6
  • Type

    conf

  • DOI
    10.1109/APS.2005.1552354
  • Filename
    1552354
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2688823