Title :
Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods [for pressure sensor design]
Author :
Gridchin, Victor A. ; Shaporin, Alexey V.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
Abstract :
The influence of tensile and compressive in-plane stresses of silicon plates are investigated. The cases of square and rectangular shaped elastic elements are considered. It is shown that in-plane stresses can have a great influence on plate deflection and stress distribution, and should be taken into account when designing piezoresistive pressure sensors
Keywords :
Galerkin method; bending; boundary-value problems; elemental semiconductors; finite element analysis; internal stresses; microsensors; piezoresistive devices; pressure sensors; silicon; stress analysis; BVP; FEM; Galerkin-Ritz method; Si; compression in-plane stresses; deflection; mechanical stresses; piezoresistive pressure sensors; planar elastic element; rectangular plates; stress distributions; tensile in-plane stresses; variational calculation; Capacitive sensors; Finite difference methods; Lattices; Mechanical sensors; Microelectronics; Moment methods; Piezoresistance; Semiconductor devices; Silicon; Tensile stress;
Conference_Titel :
Electron Devices and Materials, 2000. EDM 2000. Siberian Russian Student Workshops on
Conference_Location :
Novosibirsk
Print_ISBN :
5-7782-0291-1
DOI :
10.1109/SREDM.2000.888587
