Title :
A miniaturized SAW-PIRANI sensor
Author :
Nicolay, P. ; Elmazria, O. ; Perois, X.
Author_Institution :
Carinthian Tech Res. (CTR AG), Villach, Austria
Abstract :
SAW Pirani sensors are a promising solution for low pressure monitoring. We present here the first results obtained with a new packaging solution based on CSSP technology. Pressure sensitivity and good response time are demonstrated experimentally. A model is developed to account for the sensor´s behavior, including an observed slow drift. The paper concludes with a short discussion of the SAW Pirani sensor´s industrial potential.
Keywords :
monitoring; packaging; pressure measurement; pressure sensors; surface acoustic wave sensors; CSSP technology; chip size saw package technology; low pressure sensitivity monitoring; miniaturized SAW-PIRANI sensor; observed slow drift; packaging solution; Conductivity; Heating; Pressure measurement; Sensitivity; Surface acoustic waves; Temperature sensors; Time factors; CSSP; PIRANI; PRESSURE; SAW; SENSORS;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0385
