DocumentCode
2690294
Title
Advances in Low-Cost Manufacturing - Quasi Thin Film Technology Produces Low-Loss MIC-Components
Author
Leitner, M. ; Vahldieck, R.
fYear
1986
fDate
2-4 June 1986
Firstpage
427
Lastpage
430
Abstract
A unique method of quasi thin film (QTF) MIC fabrication on soft substrate has been developed. The new technology provides finer lines and interspaces narrower than 1.mil with tolerances of typically + 2.microns. The manufacturing process is especially promising for millimeter-wave circuits since transmission line losses and manufacturing tolerances can be reduced significantly.
Keywords
Copper; Fabrication; Manufacturing processes; Metallization; Millimeter wave circuits; Millimeter wave technology; Space technology; Substrates; Thin film circuits; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1986 IEEE MTT-S International
Conference_Location
Baltimore, MD, USA
ISSN
0149-645X
Type
conf
DOI
10.1109/MWSYM.1986.1132211
Filename
1132211
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