Title :
Advances in Low-Cost Manufacturing - Quasi Thin Film Technology Produces Low-Loss MIC-Components
Author :
Leitner, M. ; Vahldieck, R.
Abstract :
A unique method of quasi thin film (QTF) MIC fabrication on soft substrate has been developed. The new technology provides finer lines and interspaces narrower than 1.mil with tolerances of typically + 2.microns. The manufacturing process is especially promising for millimeter-wave circuits since transmission line losses and manufacturing tolerances can be reduced significantly.
Keywords :
Copper; Fabrication; Manufacturing processes; Metallization; Millimeter wave circuits; Millimeter wave technology; Space technology; Substrates; Thin film circuits; Transistors;
Conference_Titel :
Microwave Symposium Digest, 1986 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
DOI :
10.1109/MWSYM.1986.1132211
