Design of a Novel MEMS Resonant-Column Type Bionic Vector Hydrophone

Author

Linxian Liu ; Guojun Zhang ; Guiying Chen ; Wendong Zhang

Author_Institution

Key Lab. of Instrum. Sci. & Dynamic Meas., North Univ. of China, Taiyuan, China

fYear

2012

fDate

7-9 July 2012

Firstpage

179

Lastpage

182

Abstract

A Resonant-column Type Vector Hydrophone based on MEMS technology and bionic principle was presented, which consists of two-dimensional bionic hydrophone and pressure hydrophone. Based on acoustic theory, the design and manufacture of the vector hydrophone are described. Preliminary characterization calibration of the hydrophone were performed in National Defense Underwater Acoustics Calibration Laboratory of China. Results show that working frequency band is 0-3KHz, X-channel sensitivity is -177.9dB (2KHz), Y-channel sensitivity is -175.4dB (2KHz), pressure channel sensitivity is -175.8dB (2KHz); And the Resonant-column Type Bionic Vector hydrophone not only possesses good "8" directional pattern but also can withstand 3MPa pressure. The application of this novel MEMS Resonant-column Type Bionic vector hydrophone is broad, from civil ships\´ evading bonds, fishery to hydrospace detection.

Keywords

hydrophones; micromechanical devices; MEMS resonant-column type bionic vector hydrophone; X-channel sensitivity; Y-channel sensitivity; bionic principle; frequency 0 kHz to 5 kHz; pressure channel sensitivity; pressure hydrophone; two-dimensional bionic hydrophone; Acoustics; Micromechanical devices; Microstructure; Sensitivity; Sonar equipment; Vectors; Vibrations; Bionic; MEMS; Resonant-column Type; Vector Hydrophone;

fLanguage

English

Publisher

ieee

Conference_Titel

Computing, Measurement, Control and Sensor Network (CMCSN), 2012 International Conference on

Conference_Location

Taiyuan

Print_ISBN

978-1-4673-2033-7

Type

conf

DOI

10.1109/CMCSN.2012.46

Filename

6245842