Title :
Analog and digital output lateral photodiodes fabricated by µ-Czochralski process at low temperature
Author :
Derakhshandeh, Jaber ; Mofrad, M. R Tajari ; Ishihara, R. ; Beenakker, C.I.M.
Author_Institution :
Delft Inst. of Microsyst. & Nanoelectron. (DIMES), Delft Univ. of Technol., Delft, Netherlands
Abstract :
We have designed and fabricated lateral photodiodes with analog and digital outputs using μ-Czochralski process. The advantage of μ-Czochralski process is crystallization of active silicon layer at low temperature using excimer laser. Moreover, we have designed integrating analog to digital converter to change output signal to digital.
Keywords :
analogue-digital conversion; crystal growth from melt; crystallisation; excimer lasers; photodiodes; μ-Czochralski process; active silicon layer; analog output lateral photodiode; analog to digital converter; crystallization; digital output lateral photodiode; excimer laser; Crystallization; Dry etching; Filters; Image sensors; Laser ablation; PIN photodiodes; Pixel; Silicon; Temperature; Thin film transistors;
Conference_Titel :
Device Research Conference, 2009. DRC 2009
Conference_Location :
University Park, PA
Print_ISBN :
978-1-4244-3528-9
Electronic_ISBN :
978-1-4244-3527-2
DOI :
10.1109/DRC.2009.5354856
