• DocumentCode
    2692020
  • Title

    Analog and digital output lateral photodiodes fabricated by µ-Czochralski process at low temperature

  • Author

    Derakhshandeh, Jaber ; Mofrad, M. R Tajari ; Ishihara, R. ; Beenakker, C.I.M.

  • Author_Institution
    Delft Inst. of Microsyst. & Nanoelectron. (DIMES), Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2009
  • fDate
    22-24 June 2009
  • Firstpage
    93
  • Lastpage
    94
  • Abstract
    We have designed and fabricated lateral photodiodes with analog and digital outputs using μ-Czochralski process. The advantage of μ-Czochralski process is crystallization of active silicon layer at low temperature using excimer laser. Moreover, we have designed integrating analog to digital converter to change output signal to digital.
  • Keywords
    analogue-digital conversion; crystal growth from melt; crystallisation; excimer lasers; photodiodes; μ-Czochralski process; active silicon layer; analog output lateral photodiode; analog to digital converter; crystallization; digital output lateral photodiode; excimer laser; Crystallization; Dry etching; Filters; Image sensors; Laser ablation; PIN photodiodes; Pixel; Silicon; Temperature; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 2009. DRC 2009
  • Conference_Location
    University Park, PA
  • Print_ISBN
    978-1-4244-3528-9
  • Electronic_ISBN
    978-1-4244-3527-2
  • Type

    conf

  • DOI
    10.1109/DRC.2009.5354856
  • Filename
    5354856
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2692020