Title :
The challenges and limitations on triple level cell geometry and process beyond 20 nm NAND Flash technology
Author :
Lee, Yunbong ; Park, Byoungjun ; Yun, DaeHwan ; Jeong, YeonJoo ; Kim, Pyoung Hwa ; Park, Ji Yul ; Yang, Hae Chang ; Cho, Myoung Kwan ; Ahn, Kun-Ok ; Koh, Yohwan
Author_Institution :
Flash Memory Div., Hynix Semicond. Inc., Cheongju, South Korea
Abstract :
This paper investigates the challenges and difficulties of TLC cell geometry and process beyond 20nm NAND technology from the viewpoint of programmed Vth level, new HCI disturbance and charge loss in the highest programmed level.
Keywords :
NAND circuits; flash memories; hot carriers; HCI disturbance; NAND flash technology; TLC cell geometry; charge loss; highest programmed level; size 20 nm; triple level cell geometry; Boosting; Electron traps; Electronic mail; Flash memory; Geometry; Hot carrier injection; Human computer interaction; Leakage current; Substrate hot electron injection; Voltage;
Conference_Titel :
Memory Workshop (IMW), 2010 IEEE International
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-6719-8
Electronic_ISBN :
978-1-4244-7668-8
DOI :
10.1109/IMW.2010.5488388