DocumentCode

2692340

Title

Polymer Ablation With A High Power Excimer Laser Tool In Manufacturing

Author

Wolbold, Gerhard E. ; Tessle, C.L. ; Tudryn, Dawn J.

fYear

1993

fDate

9-11 Jun 1993

Firstpage

22

Lastpage

27

Keywords

Gas lasers; Laser ablation; Laser beams; Laser transitions; Lenses; Light sources; Manufacturing; Optical design; Polymers; Power lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International

Print_ISBN

0-7803-1432-8

Type

conf

DOI

10.1109/IEMT.1993.639286

Filename

639286