Title :
Polymer Ablation With A High Power Excimer Laser Tool In Manufacturing
Author :
Wolbold, Gerhard E. ; Tessle, C.L. ; Tudryn, Dawn J.
Keywords :
Gas lasers; Laser ablation; Laser beams; Laser transitions; Lenses; Light sources; Manufacturing; Optical design; Polymers; Power lasers;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639286
