Title :
Laser-based materials growth and microfabrication
Author :
Vainos, Nikcos A.
Author_Institution :
Inst. of Electron. Structure & Laser, Foundation for Res. & Technol.-Hellas, Heraklion, Greece
Abstract :
The ablation of materials by intense laser pulses enables a range of direct materials processing methods. Pulsed laser deposition achieves even epitaxial growth of complex compounds or precisely tuned novel structures. The spatially selective ablation process results in direct materials microetching and microdeposition offering novel, low-cost alternative microfabrication tools
Keywords :
laser ablation; laser beam etching; micromachining; pulsed laser deposition; epitaxial growth; intense laser pulse ablation; material growth; microdeposition; microetching; microfabrication; pulsed laser deposition; Conducting materials; Electromagnetic wave absorption; Free electron lasers; Laser ablation; Optical materials; Optical pulses; Plasma density; Pulsed laser deposition; Rapid thermal processing; Surface emitting lasers;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889123
