Title :
Silicon based micromachining technology for advanced microwave and millimeter wave applications
Author :
Grenier, Katia ; Pons, P. ; Parra, T. ; Graffeuil, J. ; Plana, R.
Author_Institution :
Lab. d´´Autom. et d´´Anal. des Syst., CNRS, Toulouse, France
Abstract :
This paper outlines the capabilities of silicon micromachining technology for the realization of passive elements featuring high performance. We also present the design method that has to be invoked in order to get good results in a very short time
Keywords :
circuit simulation; coplanar waveguide components; etching; micromachining; microwave circuits; microwave filters; microwave switches; millimetre wave circuits; millimetre wave filters; silicon; CPW; advanced microwave applications; advanced millimeter wave applications; design method; equivalent circuit; etching; filters; high performance; passive elements; silicon micromachining technology; simulation; switches; Circuits; Dielectric losses; Dielectric substrates; Electric breakdown; Frequency; Micromachining; Microwave technology; Millimeter wave technology; Silicon; Space technology;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889125
