DocumentCode
2693737
Title
Silicon based micromachining technology for advanced microwave and millimeter wave applications
Author
Grenier, Katia ; Pons, P. ; Parra, T. ; Graffeuil, J. ; Plana, R.
Author_Institution
Lab. d´´Autom. et d´´Anal. des Syst., CNRS, Toulouse, France
Volume
2
fYear
2000
fDate
2000
Firstpage
433
Abstract
This paper outlines the capabilities of silicon micromachining technology for the realization of passive elements featuring high performance. We also present the design method that has to be invoked in order to get good results in a very short time
Keywords
circuit simulation; coplanar waveguide components; etching; micromachining; microwave circuits; microwave filters; microwave switches; millimetre wave circuits; millimetre wave filters; silicon; CPW; advanced microwave applications; advanced millimeter wave applications; design method; equivalent circuit; etching; filters; high performance; passive elements; silicon micromachining technology; simulation; switches; Circuits; Dielectric losses; Dielectric substrates; Electric breakdown; Frequency; Micromachining; Microwave technology; Millimeter wave technology; Silicon; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-5885-6
Type
conf
DOI
10.1109/SMICND.2000.889125
Filename
889125
Link To Document