Title :
Simulation and microfabrication of polysilicon structures used as mass sensitive sensors for gas detection
Author :
Moldovan, Carinen ; Kim, Byong-Hak ; Raible, S. ; Moagar, Victor
Author_Institution :
Nat. Inst., Bucharest, Romania
Abstract :
The paper presents the simulation, the technological process and the fabrication of polysilicon structures used as mass sensitive sensors for gas detection. The microstructures are double ended polysilicon microbridges, released by sacrificial layer technique. The surface micromachining compatibility with integrated circuits microfabrication is followed and the bridge oscillation is tested
Keywords :
Q-factor; elemental semiconductors; etching; gas sensors; micromachining; micromechanical resonators; microsensors; semiconductor device models; silicon; ANSYS analysis; CMOS detection circuit; Q factor; Si; bridge oscillation; double ended polysilicon microbridges; electrostatic activation; etching; gas detection; mass sensitive sensors; microfabrication; microstructures; polysilicon structures; resonant frequency; sacrificial layer technique; simulation; surface micromachining compatibility; Bridge circuits; Circuit simulation; Circuit testing; Fabrication; Gas detectors; Integrated circuit technology; Integrated circuit testing; Micromachining; Microstructure; Paper technology;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889131
