Title :
Uniaxial silicon piezoresistive accelerometer
Author :
Pavelescu, Loan ; Matei, Paula
Author_Institution :
Nat. Inst., Bucharest, Romania
Abstract :
This work presents the theory and experimental studies for a silicon cantilever accelerometer with freestanding inertial mass. Such structure was 3D configured by anisotropic silicon etching on the both sides of the chip. The relative change of piezoresistance and the expression for sensitivity have been deduced. An analyse with finite element method based on ANSYS software was performed. Some elements about dynamical comportment are presented. Finally, the technological and experimental results are discussed
Keywords :
accelerometers; elemental semiconductors; etching; finite element analysis; micromachining; microsensors; piezoresistive devices; silicon; 3D structure; ANSYS program; Si; anisotropic etching; finite element analysis; free-standing inertial mass; piezoresistance; sensitivity; uniaxial silicon piezoresistive cantilever accelerometer; Accelerometers; Anisotropic magnetoresistance; Bridges; Equations; Etching; Finite element methods; Particle beams; Piezoresistance; Silicon; Stress;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889136
