Title :
Modelling of residual stress in a multilayer micromachined cantilever
Author :
Poladian, Victor Moagar ; Muller, Raluca ; Mierlacioiu, Nicoleta
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
This paper presents the stress analysis of a multilayer micromachined cantilever, using finite element ANSYS software. We compare the results with experimental investigations in order to define a configuration with minimal tensile stress
Keywords :
finite element analysis; internal stresses; micromachining; multilayers; stress analysis; ANSYS program; finite element model; multilayer micromachined cantilever; residual stress analysis; Compressive stress; Etching; Nonhomogeneous media; Optical interferometry; Optical resonators; Optical sensors; Optical waveguides; Residual stresses; Tensile stress; Thermal stresses;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889141
