DocumentCode
2694012
Title
Modelling of residual stress in a multilayer micromachined cantilever
Author
Poladian, Victor Moagar ; Muller, Raluca ; Mierlacioiu, Nicoleta
Author_Institution
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Volume
2
fYear
2000
fDate
2000
Firstpage
499
Abstract
This paper presents the stress analysis of a multilayer micromachined cantilever, using finite element ANSYS software. We compare the results with experimental investigations in order to define a configuration with minimal tensile stress
Keywords
finite element analysis; internal stresses; micromachining; multilayers; stress analysis; ANSYS program; finite element model; multilayer micromachined cantilever; residual stress analysis; Compressive stress; Etching; Nonhomogeneous media; Optical interferometry; Optical resonators; Optical sensors; Optical waveguides; Residual stresses; Tensile stress; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-5885-6
Type
conf
DOI
10.1109/SMICND.2000.889141
Filename
889141
Link To Document