Title :
Carbon based layers - preparation, characterisation and applications
Author :
Kleps, I. ; Albella, J.M. ; Stamatin, Ioan ; Angelescu, A. ; Samfirescu, N. ; Miu, M. ; Avram, M.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
Carbon based layers such as silicon carbide (SiC) and diamond-like carbon (DLC) layers were obtained by CVD methods. The properties of these layers were investigated in order to establish the optimum preparation conditions for different microsystems applications. So, silicon membranes using α-SiC or DLC layers as etching mask, as well as silicon carbide membranes using a combined porous silicon-DLC structure were fabricated for sensor applications. A detailed evaluation of the field emission (FE) properties of these films was done to demonstrate their capability to be used in field emission devices
Keywords :
CVD coatings; carbon; electron field emission; membranes; microsensors; silicon compounds; vacuum microelectronics; C; CVD; SiC; carbon-based layer; diamond-like carbon; etching mask; field emission device; microsystem technology; porous silicon-DLC structure; sensor; silicon carbide; silicon carbide membrane; silicon membrane; Carbon dioxide; Diamond-like carbon; Etching; Materials science and technology; Morphology; Physics; Semiconductor films; Silicon carbide; Substrates; Temperature;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889148
