DocumentCode
2694153
Title
Non-conventional technologies for micro-optical components: a survey
Author
Dumbrãvescu, N.
Author_Institution
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Volume
2
fYear
2000
fDate
2000
Firstpage
535
Abstract
Although “traditional” silicon planar technology has generated the field of microoptics, it is able to produce only a few shapes. To avoid that, many “non-conventional” alternative technologies, based especially on different polymeric materials, are presently investigated. This paper reports on the experimental study of three such technologies; LiGA based techniques, gray-tone lithography and embossing alternatives in polymers
Keywords
LIGA; micro-optics; optical fabrication; optical polymers; LIGA; embossing; gray-tone lithography; micro-optical component; microfabrication technology; polymer; Coatings; Fabrication; Lithography; Microoptics; Optical materials; Optical polymers; Optical sensors; Research and development; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-5885-6
Type
conf
DOI
10.1109/SMICND.2000.889150
Filename
889150
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