DocumentCode :
2694274
Title :
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Author :
Garcia-Gancedo, Luis ; Pedros, Jorge ; Iborra, E. ; Clement, M. ; Olivares, J. ; Capilla, J. ; Luo, Jack K. ; Milne, W.I. ; Flewitt, Andrew J.
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge, UK
fYear :
2012
fDate :
7-10 Oct. 2012
Firstpage :
1545
Lastpage :
1548
Abstract :
The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users´ ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs´ mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.
Keywords :
Bragg gratings; acoustic resonators; bulk acoustic wave devices; gravimeters; sensors; thin film devices; Bragg reflectors design; Bragg reflectors fabrication; FBAR mass responsitivity; SMR; film bulk acoustic resonators; gravimetric sensing applications; gravimetric sensors; mass loadings; minimum detection limit; resonant frequency; solidly mounted resonators; specific device design; thin film technology; Acoustic waves; Film bulk acoustic resonators; Films; Resonant frequency; Sensors; Zinc oxide; BAW; FBAR; SMR; Zinc Oxide (ZnO); micro-weighting; responsitivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
ISSN :
1948-5719
Print_ISBN :
978-1-4673-4561-3
Type :
conf
DOI :
10.1109/ULTSYM.2012.0386
Filename :
6562396
Link To Document :
بازگشت