DocumentCode :
2694720
Title :
Dry Etching Techniques For Nanostructures
Author :
Pang, Stella W.
Author_Institution :
University of Michigan
fYear :
1997
fDate :
14-18 July 1997
Firstpage :
147
Lastpage :
147
Keywords :
Dry etching; Gallium arsenide; Lattices; Nanostructures; Optical device fabrication; Optical devices; Photonic band gap; Photonic crystals; Stimulated emission; Ultrafast optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
Type :
conf
DOI :
10.1109/CLEOPR.1997.610642
Filename :
610642
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2694720
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