DocumentCode
2694720
Title
Dry Etching Techniques For Nanostructures
Author
Pang, Stella W.
Author_Institution
University of Michigan
fYear
1997
fDate
14-18 July 1997
Firstpage
147
Lastpage
147
Keywords
Dry etching; Gallium arsenide; Lattices; Nanostructures; Optical device fabrication; Optical devices; Photonic band gap; Photonic crystals; Stimulated emission; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-3889-8
Type
conf
DOI
10.1109/CLEOPR.1997.610642
Filename
610642
Link To Document