DocumentCode
2694794
Title
Design and Evaluation of UHF Monolithic Film Resonator - Stabilized Oscillators and Bandpass Filters
Author
Driscoll, M. ; Moore, R. ; Rosenbaum, J. ; Krishnaswamy, S. ; Szedon, J.
Volume
2
fYear
1987
fDate
May 9 1975-June 11 1987
Firstpage
801
Lastpage
804
Abstract
Monolithic, bulk acoustic wave resonators have been fabricated by sputter-deposition of piezoelectric films into supporting membranes formed in semiconductor substrates.
Keywords
Acoustic devices; Band pass filters; Biomembranes; Capacitance; Circuits; Electrodes; Film bulk acoustic resonators; Piezoelectric films; Substrates; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1987 IEEE MTT-S International
Conference_Location
Palo Alto, CA, USA
ISSN
0149-645X
Type
conf
DOI
10.1109/MWSYM.1987.1132536
Filename
1132536
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