Title :
On the optimization of piezoelectrically actuated MEMS resonators
Author :
Frangi, Alejandro ; Cremonesi, Massimiliano ; Jaakkola, Anttoni ; Pensala, Tuomas
Author_Institution :
Dept. of Struct. Eng., Politec. di Milano, Milan, Italy
Abstract :
We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.
Keywords :
circuit optimisation; crystal resonators; microactuators; micromechanical resonators; numerical analysis; interfacial losses; numerical analysis; pattern optimization; piezo MEMS square extensional resonators; piezoelectrically actuated MEMS resonators optimization; piezolayer; selected mechanical modes; stress jump; viscous dissipation type; Acoustics; Electrodes; Materials; Micromechanical devices; Optimization; Q-factor; Strain;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0261
