• DocumentCode
    2695067
  • Title

    Robust H∞ control in nano-positioning

  • Author

    Chunag, Ning ; Petersen, Ian R.

  • Author_Institution
    Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
  • fYear
    2010
  • fDate
    8-10 Sept. 2010
  • Firstpage
    2237
  • Lastpage
    2244
  • Abstract
    This paper considers the use of robust H∞ tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H∞ controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
  • Keywords
    H∞ control; control system synthesis; hysteresis; nanopositioning; piezoelectric actuators; robust control; controller design; hysteresis; nanopositioning system; nonlinear model; piezoelectric actuator; robust H∞ control; robust H∞ tracking control; Equations; Frequency measurement; Hysteresis; Mathematical model; Piezoelectric actuators; Robustness; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control Applications (CCA), 2010 IEEE International Conference on
  • Conference_Location
    Yokohama
  • Print_ISBN
    978-1-4244-5362-7
  • Electronic_ISBN
    978-1-4244-5363-4
  • Type

    conf

  • DOI
    10.1109/CCA.2010.5611252
  • Filename
    5611252
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2695067