Title :
Time response and dynamic behavior of electrostatic driven RF MEMS capacitive switches for phase shifter applications
Author :
He, Xun-jun ; Jin, Bo-shi ; Wu, Qun ; Yin, Jing-Hua
Author_Institution :
Sch. of Electron. & Inf. Technol., Harbin Inst. of Technol.
Abstract :
This paper analyzes the effects of the materials, the driven voltage, the switch height, the width of the CPW signal line and the quality factor on the switching time and the dynamic behavior of electrostatic driven RF MEMS capacitive switches for the microwave distributed MEMS shifters to reduce the switching time and the impact velocity, and increase the capacitive ratio
Keywords :
Q-factor; coplanar waveguides; microswitches; microwave phase shifters; CPW signal line; capacitive ratio; driven voltage; dynamic behavior; electrostatic driven RF MEMS capacitive switches; impact velocity; microwave distributed MEMS shifters; phase shifter applications; quality factor; switch height; switching time; time response; Coplanar waveguides; Electrostatic analysis; Phase shifters; Q factor; RF signals; Radiofrequency microelectromechanical systems; Signal analysis; Switches; Time factors; Voltage;
Conference_Titel :
Antennas and Propagation Society International Symposium 2006, IEEE
Conference_Location :
Albuquerque, NM
Print_ISBN :
1-4244-0123-2
DOI :
10.1109/APS.2006.1710961
