Title :
A Hall Effect Microsensor For Micromechanical Device Characterization
Author :
Grande, W.J. ; Reznik, S. ; Ertel, J.
Author_Institution :
Eastman Kodak Company
Keywords :
Bonding; Hall effect; Magnetic field measurement; Magnetic sensors; Magnetization; Magnets; Micromechanical devices; Microsensors; Polarization; Sensor phenomena and characterization;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.598007