Title :
Automatic optical inspection (AOI) of thin film multichip modules
Author :
Hecht, Oded ; Dishon, Giora
Author_Institution :
Orbot Inc., Woburn, MA, USA
Abstract :
AOI (automatic optical inspection), a proven technology that has gained recognition as substantially improving the production yield of MCMs (multichip modules), is based on sophisticated image processing techniques using advanced software algorithms with state-of-the-art hardware. AOI technology is described here with respect to detection methods, resolution, speed, versatility, and accuracy. Attention is also given to the benefits of AOI, including yield increase, long-term reliability, scrap savings, and process control.<>
Keywords :
automatic optical inspection; computerised picture processing; hybrid integrated circuits; integrated circuit manufacture; modules; AOI; MCMs; accuracy; automatic optical inspection; detection methods; image processing techniques; long-term reliability; process control; production yield; resolution; scrap savings; software algorithms; speed; thin film multichip modules; versatility; yield increase; Automatic optical inspection; Image converters; Image processing; Lenses; Lighting; Multichip modules; Optical films; Pixel; Smart cameras; Thin film devices;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1990, IEMT Conference., 8th IEEE/CHMT International
Conference_Location :
Baveno, Italy
DOI :
10.1109/IEMT8.1990.171097
