Title :
High resolution integrated microfluidic Fabry-Perot refractometer in silicon
Author :
St-Gelais, R. ; Masson, J. ; Peter, Y.A.
Author_Institution :
Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montreal, QC
Abstract :
We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.
Keywords :
Bragg gratings; Fabry-Perot resonators; distributed Bragg reflectors; elemental semiconductors; etching; integrated optics; micro-optomechanical devices; microfluidics; microsensors; optical fabrication; optical filters; refractive index measurement; refractometers; silicon; Bragg reflectors; Si; etching process; in-plane Fabry-Perot filter; integrated microfluidic Fabry-Perot refractometer; integrated microfluidic refractive index sensor; liquids injection; microfluidic channel; refractive index; resonance wavelength shift; silicon; Costs; Etching; Fabry-Perot; Filters; Liquids; Microfluidics; Optical refraction; Refractive index; Robustness; Silicon;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607806
