DocumentCode

269616

Title

Journal of Microelectromechanical Systems publication information

Volume

22

Issue

2

fYear

2013

fDate

Apr-13

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2254380

Filename

6490363