MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging

Author

Piyawattanametha, W. ; Mandella, M.J. ; Ra, H. ; Liu, J.T. ; Garai, E. ; Kino, G.S. ; Solgaard, O. ; Contag, C.H.

Author_Institution

Edward L. Ginzton Lab., Stanford Univ., Stanford, CA

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

42

Lastpage

43

Abstract

We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).

Keywords

bioMEMS; biomedical optical imaging; endoscopes; infrared imaging; micro-optomechanical devices; microactuators; optical microscopy; optical scanners; DC optical scan angles; axial resolutions; confocal microscopy; dual-axes confocal clinical endoscope; frequency 1.1 kHz; frequency 3.1 kHz; full-width-half-maximum transverse resolutions; maximum imaging rate; near infrared wavelength region; real time in vivo imaging; resonance frequencies; size 5.5 mm; two-dimensional MEMS scanner; vertical-comb actuators; wavelength 785 nm; Actuators; Endoscopes; Image resolution; In vivo; Micromechanical devices; Microscopy; Optical imaging; Packaging; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607819

Filename

4607819