Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

Author

Nakada, M. ; Takahashi, K. ; Higo, A. ; Fujita, H. ; Toshiyoshi, H.

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Tokyo

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

48

Lastpage

49

Abstract

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

Keywords

CVD coatings; endoscopes; micro-optomechanical devices; optical design techniques; optical fabrication; optical materials; optical scanners; optical tomography; organic compounds; silicon-on-insulator; CVD-processed organic material; OCT endoscope application; SOI-MEMS process technology; chemical stability; elastic constant; electrostatic optical scanner; low-voltage MEMS scanner; parylene-hinged slow-scan optical scanner; resonance frequency; Chemical technology; Electrostatics; Endoscopes; Micromechanical devices; Optical design; Optical device fabrication; Organic chemicals; Organic materials; Resonance; Stability; endoscope; low resonance frequency; parylene; scanner;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607822

Filename

4607822