• DocumentCode
    2696434
  • Title

    Nanostructured effective-index micro-optical devices based on blazed 2-D sub-wavelength gratings with uniform features on a variable-pitch

  • Author

    Dickensheets, David L. ; Herzig, H.P. ; Nakagawa, Wataru ; Suter, K. ; Staufer, Urs

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Montana State Univ., Bozeman, MT
  • fYear
    2008
  • fDate
    11-14 Aug. 2008
  • Firstpage
    54
  • Lastpage
    55
  • Abstract
    Sub-wavelength two-dimensional gratings are formed by etching holes into silicon using DRIE followed by thermal oxidation. Smoothly graded effective index blazing is possible using uniform holes on a variable grating pitch, exhibiting minimal etch lag.
  • Keywords
    diffraction gratings; elemental semiconductors; micro-optics; nanostructured materials; silicon; sputter etching; Si; blazed 2D sub wavelength gratings; etching holes; nanostructured effective index microoptical devices; thermal oxidation; uniform features; variable pitch; Diffraction gratings; Etching; Nanoscale devices; Optical diffraction; Optical refraction; Optical variables control; Oxidation; Polarization; Reluctance generators; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • Conference_Location
    Freiburg
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    978-1-4244-1918-0
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607825
  • Filename
    4607825
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2696434