Title :
Nanostructured effective-index micro-optical devices based on blazed 2-D sub-wavelength gratings with uniform features on a variable-pitch
Author :
Dickensheets, David L. ; Herzig, H.P. ; Nakagawa, Wataru ; Suter, K. ; Staufer, Urs
Author_Institution :
Dept. of Electr. & Comput. Eng., Montana State Univ., Bozeman, MT
Abstract :
Sub-wavelength two-dimensional gratings are formed by etching holes into silicon using DRIE followed by thermal oxidation. Smoothly graded effective index blazing is possible using uniform holes on a variable grating pitch, exhibiting minimal etch lag.
Keywords :
diffraction gratings; elemental semiconductors; micro-optics; nanostructured materials; silicon; sputter etching; Si; blazed 2D sub wavelength gratings; etching holes; nanostructured effective index microoptical devices; thermal oxidation; uniform features; variable pitch; Diffraction gratings; Etching; Nanoscale devices; Optical diffraction; Optical refraction; Optical variables control; Oxidation; Polarization; Reluctance generators; Silicon;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607825
